Vacuum UV spectrophotometer
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Developed by the Laser Research Center (LZH) in Hannover, Germany – a professional-grade device that truly measures the permeability/reflectivity of the UV band
- Vacuum ultraviolet region (115-220nm) of optical components absorption, transmesency / reflectivity test has been a more difficult challenge, due to the residual oxygen contained in the air and trace organic matter, in the UV light irradiation will occur on the surface of the element photochemical reaction and irradiation deterioration and other reasons, there is a sample test result error is unacceptable, and the same sample at different times to test the transmeance of the result is different. LZH researchers have developed their own VUV vacuum UV spectrophotometer according to their own scientific research needs
- System a variety of test capabilities: absolute transmittance, absolute reflectivity, absorption rate, variable angle test, variable angle scattering rate, etc.;
- Application of high-performance optical material analysis, ultra-smooth surface processing; vacuum ultraviolet optical coating, etc
System functionality
- Radiant light source: dual D2 lamp (110-230nm), and D2 (155-300nm)
- Spectroscopic monochromator (MgF2 window)
- Measuring sample chambers, evacuation systems and gauges, compatible with full vacuum and nitrogen-filled test conditions.
- 4-bit sample holder, one background correction, 3 samples can be placed.
- Flexible setting of test procedures;
- The system is controlled by software and runs fully automatically
- Standard samples of PTB (German Institute of Metrology) correction are available
SPECIFICATIONS Specifications
- Spectrometer wavelength repeatability: < 0.1 nm
- Spectral resolution: < 0.7 nm @1200g raster
- 0% baseline flatness: Opaque sample < ± 0.05% (PV)
- 100% baseline flatness: 150-230nm STD 0.15% PV±3 %
- Angle of incidence test range: Transmission: 0° – 80° & Reflection: 7° – 80
- System Stability: 1hour < 75 % (PV)
- Photometric accuracy T< 0.3 % @ 190 nm – 210 nm; R< 0.6 % @ 190 nm – 230 nm
- Polarization test efficiency: R < 0.1% at Brewster angles
- Detector adjustment angle accuracy: Accuracy < 0.1°
- Sample size: Diameter ∅ = 1”/ ∅ = 2”
The measured transreflectivity accuracy of the sample
Reflectance test compared to standard over HR sample @180-230 Error R<0.3% (PTB=95%, measured=94.7~95.2%@193nm) |
Compared with standard quartz flakes transmittance test @120-190nm T error <0.3% (PTB=9.3%; measured T=9.1%@193nm) |
